Semiconductor memory device and method for manufacturing the same
AssigneeToshiba Memory Corporation
InventorJun Nishimura
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AssigneeToshiba Memory Corporation
InventorJun Nishimura
Estimating the term…
According to one embodiment, a semiconductor memory device includes a substrate, interconnect portions, a conductive layer, a stacked body, and columnar portions. At least one portion of the interconnect portions is provided inside the substrate, each of the interconnect portions extends in a first direction along a surface of the substrate, and the interconnect portions are arranged along a second direction crossing the first direction. The conductive layer is provided on the interconnect portions. The stacked body is provided on the conductive layer and includes electrode layers stacked to be separated from each other, and each of the electrode layers extends in the second direction. The columnar portions are provided inside the stacked body, each of the columnar portions includes a semiconductor portion extending in a stacking direction of the electrode layers and a charge storage film provided between the semiconductor portion and the stacked body.
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.