EEPROM device
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsPeng Huang, Jun Li, Honggang Dai, Guanguan Gu
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AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsPeng Huang, Jun Li, Honggang Dai, Guanguan Gu
Estimating the term…
A semiconductor device includes a semiconductor substrate, a first dielectric layer having a first thickness on the semiconductor substrate, a first opening having a first width in the first dielectric layer, a second dielectric layer having a second thickness disposed in a middle region of the first opening, and a third dielectric layer having a first portion and a second portion disposed on opposite sides of second dielectric layer. The first portion and the second portion have a second width smaller than the first width, and the third dielectric layer has a third thickness smaller than the first thickness and the second thickness.
A semiconductor device comprising:
An electronic device comprising a semiconductor device and an electronic component connected to the semiconductor device, wherein the semiconductor device comprises:
Dependencies are inferred from the claim text.