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US 10,483,203 B2Granted
Semiconductor memory device having pads of varying widths
AssigneeSK hynix Inc.
InventorYung Jun Kim
Life of this patent
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Abstract
Provided herein is a semiconductor memory device. The semiconductor memory device may include channel layers protruding away from a substrate. The semiconductor memory device may include a plurality of pads respectively coupled to the channel layers. The widths of the pads may or may not be increased depending on a bending of the channel layers.
Claims26
A semiconductor memory device comprising:
- channel layers protruding away from a substrate;
- conductive layers configured to enclose the channel layers and stacked on the substrate, the conductive layers extending in a first direction;
- a plurality of pads coupled to the channel layers and arranged in the first direction;
- and
- a plurality of bit lines coupled to the channel layers through the plurality of pads,
- wherein a pad of the plurality of pads has a width in the first direction so that the pad is wider relative to a preceding pad of the plurality of pads, and
- wherein the channel layers are directly connected to the pads, respectively.
4 more elements
A semiconductor memory device comprising:
- a plurality of bit lines;
- a source line;
- channel layers coupled between the plurality of bit lines and the source line;
- and
- pads arranged on the channel layers, wherein the channel layers are directly connected to the pads, respectively,
- wherein the plurality of bit lines are coupled to the channel layers through the pads, and
- wherein the pads include a first pad disposed at a medial portion, a second pad disposed at a first outermost position and a third pad disposed at a second outermost position, and a width of the second pad or the third pad is greater than a width of the first pad.
4 more elements
A semiconductor memory device comprising:
- contact plugs;
- channel layers protruding away from a substrate;
- and
- a plurality of pads respectively coupled between the contact plugs and channel layers,
- wherein the pads have a greater width as a bending of the channel layers or the contact plugs increases.
2 more elements
Dependencies are inferred from the claim text.