Electrostatic chuck heater

An electrostatic chuck heater comprising:

• an electrostatic chuck in which an electrostatic electrode is embedded in a ceramic sintered body;
• a small-zone formation region provided inside the ceramic sintered body or a heater support body that is integrated with the ceramic sintered body, the small-zone formation region including a plurality of small zones in which small heater electrodes are wired;
• a power source to which the plurality of small heater electrodes are connected in parallel;
• and
• a small-zone control apparatus that performs control such that desired electric power is supplied to each of the small heater electrodes by using an output ratio to a suppliable output corresponding to each of the small heater electrodes,
• wherein among the plurality of small heater electrodes, a small heater electrode that is wired in a small zone including a cool spot has a resistance that is set to a smaller value than that of the other small heater electrodes.