End effector and substrate conveying robot

An end effector capable of holding two or more substrates, comprising:

• a base at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in substrate storage;
• a substrate holder provided on the base so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, the substrate holder comprising
• a substrate support provided on a distal end side of an end effector body including the base, the substrate support including a surface supporting a bottom surface edge portion of the substrate, and
• a connector comprising a rotary spindle connecting the substrate support to the distal end side of the end effector body so that the substrate support pivots in response to an external force when the external force is applied to the substrate support;
• and
• a servo motor for changing a protrusion amount of the substrate holder from a reference surface including a surface of the base opposed to the lowermost substrate or the uppermost substrate,
• wherein the servo motor is configured for applying a drive force to a whole of the substrate holder, and
• wherein an plunger and an abutment comprising a roller connected to the plunger are configured for prohibiting a displacement of the substrate support when the external force is applied to the substrate support.