US 10,483,140 B2Granted

Mask transmission equipment

AssigneeWinbond Electronics Corp.

InventorsChia-Lu Hsu, Yao-Nan Su, Chen-Ya Cheng

Life of this patent

Estimating the term…

Loading patent…

Abstract

A mask transmission equipment is provided. The mask transmission equipment includes a wafer transmission container and a supporting bracket. The wafer transmission container includes a plurality of first positioning grooves and a plurality of second positioning grooves. The first positioning grooves face the second positioning grooves. The first positioning grooves and the second positioning grooves are adapted to position a plurality of wafers. The supporting bracket is disposed in the wafer transmission container. The supporting bracket includes a first supporting unit, a second supporting unit, a first wing and a second wing. The first supporting unit is stacked on the second supporting unit. The first wing is disposed on a first side of the supporting bracket. The second wing is disposed on a second side of the supporting bracket. The first side is opposite to the second side.

Claims14

Dependent claims

A mask transmission equipment, comprising:

a wafer transmission container, comprising a plurality of first positioning grooves and a plurality of second positioning grooves, wherein the first positioning grooves face the second positioning grooves, the first positioning grooves and the second positioning grooves are adapted to position a plurality of wafers, and each first positioning groove and the corresponding second positioning groove are adapted to position one of the wafers;
and
a supporting bracket, disposed in the wafer transmission container, comprising a first supporting unit, a second supporting unit, a first wing and a second wing, wherein the first supporting unit is stacked on the second supporting unit, the first wing is disposed on a first side of the supporting bracket, the second wing is disposed on a second side of the supporting bracket, the first side is opposite to the second side, the first wing is inserted into one of the first positioning grooves, and the second wing is inserted into one of the second positioning grooves.

Dependencies are inferred from the claim text.

Facts

Application: 16/193,342Filed 16 Nov 2018
Priority: CN 2018 1 005226819 Jan 2018
Published: US 2019/0228999 A125 Jul 2019
Granted: 19 Nov 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

H10P 72/1906
Closed carriers: specially adapted for containing masks, reticles or pellicles
H10P 72/1921
Closed carriers: characterised by substrate supports
H10P 72/1922
Closed carriers: characterised by the construction of the closed carrier
H10P 72/3218
Between different workstations: conveying cassettes, containers or carriers

Family

US 2019/0228999 A1Pre-grant publication · published 25 Jul 2019
US 10,483,140 B2This patent

From the US filing history. Foreign family members aren’t listed.

Timeline

Citations

Open elsewhere

Building an agent or pulling many patents? Use the API or MCP server instead of scraping pages. Get an API key