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US 10,483,138 B2Granted
Wafer clamp and a method of clamping a wafer
AssigneeHimax Technologies Limited
InventorsFang Wan Lu, Jui Tang Chang
Life of this patent
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Abstract
A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.
Claims9
A wafer clamp comprising:
- a platform with a top surface;
- a stopper disposed at a front end of the platform;
- a push rod disposed at a rear end of the platform;
- at least one actuator pivotally connected to the push rod;
- and
- a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor;
- wherein the actuator comprises a pneumatic cylinder, a front end of which pulls back to an original position when the pneumatic cylinder is not actuated.
4 more elements
The wafer clamp comprising:
- a platform with a top surface;
- a stopper disposed at a front end of the platform;
- a push rod disposed at a rear end of the platform;
- at least one actuator pivotally connected to the push rod;
- and
- a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor;
- wherein the sensor comprises a fiber optic sensor, which comprises a reflective fiber optic sensor.
4 more elements
Dependencies are inferred from the claim text.