Ceramic heater and electrostatic chuck

A ceramic heater having a plate-like form and comprising:

• a laminate of a ceramic substrate and a base substrate, the ceramic substrate including an internal heat-generating element,
• wherein, as viewed in a thickness direction, the ceramic heater has heating zones and a hole region disposed within a certain one of the heating zones, the hole region corresponding to:
• (a) a hole defined by the ceramic substrate, or
• (b) a through hole defined by the base substrate;
• the internal heat-generating element includes zone heat-generating elements disposed in respective heating zones so as to heat the ceramic substrate independently;
• and
• a zone heat-generating element disposed in the certain one of the heating zones having the hole region is formed of a heat-generating conductor which has a first parallel segment disposed in parallel with a second adjacent parallel segment and a turning-back segment which connects, while turning back, the first and second parallel segments of the heat-generating conductor extending toward the hole region so as to prevent the first and second parallel segments extending toward the hole region from overlying the hole region;
• wherein, as viewed in the thickness direction, the entire turning-back segment is positioned between the first parallel segment and the second parallel segment.