Self directed metrology and pattern classification

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining one or more parameters of a process to be performed on a specimen, wherein the computer-implemented method comprises:

• determining an area of a defect detected on the specimen;
• correlating the area of the defect with information for a design for the specimen;
• determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating;
• and
• automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by a measurement subsystem during a process performed on the specimen by the measurement subsystem, wherein the measurement subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy.

A computer-implemented method for determining one or more parameters of a process to be performed on a specimen, comprising:

• determining an area of a defect detected on the specimen;
• correlating the area of the defect with information for a design for the specimen;
• determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating;
• and
• automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by a measurement subsystem during a process performed on the specimen by the measurement subsystem, wherein the measurement subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy, and wherein said determining the area, said correlating, said determining the spatial relationship, and said automatically generating are performed by one or more computer systems.