Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

A method for operating a charged particle beam device, comprising:

• generating a primary charged particle beam;
• generating a first beamlet from the primary charged particle beam and a second beamlet from the primary charged particle beam;
• scanning the first beamlet and the second beamlet over a specimen;
• guiding the first beamlet with a first deflection field of a first blanking deflector into an annular shaped body of a charged particle beam dump;
• and
• trapping charged particles of the first beamlet or generated by the first beam let by
• an annular shaped electrode provided partially above the annular shaped body having an inner perimeter side and an outer perimeter side, wherein the inner perimeter side is outside of the radius of an inner perimeter wall of the annular shaped body.