Method for manufacturing radiation window and a radiation window
AssigneeHs Foils Oy
InventorsPekka Torma, Heikki Johannes Sipila
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Abstract
For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.
Claims13
A method for manufacturing a radiation window for an X-ray measurement apparatus, comprising:
- producing an etch stop layer on a polished surface of a carrier,
- using a thin film deposition technique to produce a first boron carbide layer on an opposite side of said etch stop layer than said carrier,
- soldering the combined structure comprising said carrier, said etch stop layer, and said first boron carbide layer to a region around an opening in a support structure with said first boron carbide layer facing said support structure,
- etching away the middle area of said carrier forming an additional support structure, and
- after etching away the middle area of said carrier, producing a second boron carbide layer as an additional layer on the exposed etch stop layer on an opposite side of the etch stop layer than said first boron carbide layer.
A radiation window for an X-ray measurement apparatus, comprising:
- a support structure that defines an opening, and
- stretched across said opening a layered window foil that is soldered to the support structure at a region around said opening;
- wherein said layered window foil comprises a first boron carbide layer manufactured by a thin film deposition technique, an etch stop layer on an opposite side of said first boron carbide layer than said support structure, and an additional support structure on an opposite side of said etch stop layer than said first boron carbide layer, and
- wherein the radiation window comprises a second boron carbide layer on an opposite side of said etch stop layer than said first boron carbide layer.
Dependencies are inferred from the claim text.