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US 10,481,510 B2Granted
Graphene spectral purity filter
AssigneeASML Netherlands B.V.
InventorsAndrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen
Life of this patent
Estimating the term…
Abstract
A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.
Claims27
A spectral purity filter comprising a graphene structure having uniform thickness and homogeneous composition wherein the graphene has an EUV transmittance of greater than 85%.
Dependencies are inferred from the claim text.