Vibration damping apparatus, lithography apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsYoshihiro Morimoto, Hiromichi Hara, Masahiko Ogawa, Ryo Takai
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Abstract
The present invention provides a vibration damping apparatus that performs vibration damping of a first optical element among a plurality of optical elements arranged in a barrel, comprising: a holding member connected to the barrel and configured to hold the first optical element; and a mass body supported by the holding member via a damper element, wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements.
Claims25
A vibration damping apparatus that performs vibration damping of a first optical element among a plurality of optical elements arranged in a barrel, comprising:
- a holding member connected to the barrel and configured to hold the first optical element;
- and
- a mass body spaced apart from the barrel and supported by the holding member via a damper element,
- wherein the mass body includes a second optical element arranged in the barrel and different from the first optical element among the plurality of optical elements.
A lithography apparatus that forms a pattern on a substrate, comprising:
- an optical system that includes a plurality of optical elements arranged in a barrel;
- and
- a vibration damping apparatus configured to perform vibration damping on a first optical element among the plurality of optical elements arranged in the barrel,
- wherein the vibration damping apparatus includes:
- a holding member connected to the barrel and configured to hold the first optical element;
- and
- a mass body spaced apart from the barrel and supported by the holding member via a damper element, and
- wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements.
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate using a lithography apparatus;
- processing the substrate, on which the pattern has been formed, to manufacture the article,
- wherein the lithography apparatus that forms a pattern on the substrate, comprising:
- an optical system that includes a plurality of optical elements arranged in a barrel;
- and
- a vibration damping apparatus configured to perform vibration damping on a first optical element among the plurality of optical elements arranged in the barrel,
- wherein the vibration damping apparatus includes:
- a holding member connected to the barrel and configured to hold the first optical element;
- and
- a mass body spaced apart from the barrel and supported by the holding member via a damper element, and
- wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements.
A vibration damping apparatus that performs vibration damping on a first optical element and a second optical element among a plurality of optical elements arranged in a barrel, comprising:
- a first holding member connected to the barrel and configured to hold the first optical element;
- a second holding member connected to the barrel and configured to hold the second optical element;
- and
- a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element.
A lithography apparatus that forms a pattern on a substrate, comprising:
- an optical system that includes a plurality of optical elements arranged in a barrel;
- and
- a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel,
- wherein the vibration damping apparatus includes:
- a first holding member connected to the barrel and configured to hold the first optical element;
- a second holding member connected to the barrel and configured to hold the second optical element;
- and
- a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element.
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate using a lithography apparatus;
- processing the substrate, on which the pattern has been formed, to manufacture the article,
- wherein the lithography apparatus that forms a pattern on a substrate, comprising:
- an optical system that includes a plurality of optical elements arranged in a barrel;
- and
- a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel, and
- wherein the vibration damping apparatus includes:
- a first holding member connected to the barrel and configured to hold the first optical element;
- a second holding member connected to the barrel and configured to hold the second optical element;
- and
- a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element.
A vibration damping apparatus that performs vibration damping on a first optical element and a second optical element among a plurality of optical elements arranged in a barrel;
- comprising:
- a first holding member connected to the barrel and configured to hold the first optical element;
- and
- a second holding member connected to the barrel and configured to hold the second optical element,
- wherein the first holding member and the second holding member are connected to each other by a damper element.
A lithography apparatus that forms a pattern on a substrate, comprising:
- an optical system including a plurality of optical elements arranged in a barrel;
- and
- a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel,
- wherein the vibration damping apparatus includes:
- a first holding member connected to the barrel and configured to hold the first optical element;
- and
- a second holding member connected to the barrel and configured to hold the second optical element, and
- wherein the first holding member and the second holding member are connected to each other by a damper element.
Dependencies are inferred from the claim text.