Imprint apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorKeiji Yamashita
Life of this patent
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Abstract
An imprint apparatus performs pressing of an imprint material on a substrate with a mold to form a pattern on the substrate. The imprint apparatus includes a supply device configured to supply a condensable gas to a space between the imprint material and the mold. The condensable gas is liquefied by the pressing. The apparatus further includes a pipe for transferring the condensable gas in a gas state to the supply device and a storage connected to the pipe. The storage stores the condensable gas in a liquid state. The supply device is configured to supply the condensable gas vaporized in the storage and transferred through the pipe from the storage.
Claims9
An apparatus that cures an uncured material on a substrate in a state of bringing a member and the uncured material into contact with each other, the apparatus comprising:
- a gas supply device configured to supply a condensable gas to a space between the uncured material and the member, the condensable gas being liquefied by pressing;
- a pipe for transferring the condensable gas in a gas state to the gas supply device;
- and
- a storage connected to the pipe, the storage storing the condensable gas in a liquid state,
- wherein the gas supply device is configured to supply the condensable gas vaporized in the storage and transferred through the pipe from the storage.
Dependencies are inferred from the claim text.