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US 10,481,441 B2Granted
Mask, corresponding spacer structure, and liquid crystal display panel using the same
AssigneeAu Optronics Corporation
InventorYung-Chen Liu
Life of this patent
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Abstract
A mask, a corresponding spacer structure and a liquid crystal display panel using the same are provided. The mask includes a first opening region and a second opening region. The first opening region and the second opening region respectively have geometric shapes with the ratio of the length to the width or the ratio of the long axis to the short axis being greater than or equal to 1.25, and the area of the first opening region is greater than the area of the second opening region.
Claims8
A method of making a spacer structure by using a binary mask, comprising:
- providing the binary mask, wherein the binary mask has a first opening region and a second opening region, wherein the first opening region and the second opening region respectively have geometric shapes with the ratio of the length to the width or the ratio of the long axis to the short axis being greater than or equal to 1.25, and the area of the first opening region is greater than the area of the second opening region;
- projecting a light ray onto a photosensitive material through the first opening region and the second opening region of the binary mask to form a first spacer and a second spacer respectively;
- wherein the first spacer has a geometric shape corresponding to the ratio of the length to the width or the ratio of the long axis to the short axis of the first opening region, the second spacer has a geometric shape corresponding to the ratio of the length to the width or the ratio of the long axis to the short axis of the second opening region, and there is a height difference between the first spacer and the second spacer.
Dependencies are inferred from the claim text.