Interactive graphical representation of image quality and control thereof
AssigneeFEI Company
InventorsPavel Poto{hacek over (c)}ek, Remco Schoenmakers
Life of this patent
Estimating the term…
Loading patent…
AssigneeFEI Company
InventorsPavel Poto{hacek over (c)}ek, Remco Schoenmakers
Estimating the term…
Systems and methods for controlling an imaging device are disclosed. In one aspect, a method determines a set of control parameters for the imaging device, and acquires an image based on the set of control parameters. The method determines a plurality of image quality measurements of the first image. A polygon may be displayed on an electronic display based on a plurality of image quality measurements. For example, positions of polygon vertices may be determined relative to an origin point based on corresponding image quality measurements. In some aspects, input may be received from a user interface indicating a change in position of one or more of the vertices and the corresponding image quality measurements. In some aspects, a new set of control parameters may then be determined to achieve the changed image quality measurement(s). In some aspects a composite measure of the image quality measurements may also be displayed.
A method, comprising:
An apparatus for controlling an image capture device, the apparatus comprising:
A non-transitory computer-readable storage medium having stored thereon instructions that, when executed, cause an electronic hardware processor of an image capture device to:
The apparatus of 7, wherein the image capture device is an electron beam microscope or an ion beam microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes at least one of a stigmator coil current and a dwell time.
The apparatus of 7, wherein the image capture device is an electron beam microscope or an ion beam microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes a stigmator coil current.
The apparatus of 12, wherein the image capture device is an electron beam microscope or an ion beam microscope, and the first and second sets of image capture control parameters determined by the electronic hardware processor include at least one of a stigmator coil current and a dwell time.
The apparatus of 7, wherein the image capture device is a scanning microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes a dwell time.
Dependencies are inferred from the claim text.