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AssigneeMagic Leap, Inc.
InventorsChristophe Peroz, Mauro Melli, Vikramjit Singh, David Jurbergs, Jeffrey Dean Schmulen, Zongxing Wang, Shuqiang Yang, Frank Y. Xu, Kang Luo, Marlon Edward Menezes, Michael Nevin Miller
Estimating the term…
A method of manufacturing a waveguide having a combination of a binary grating structure and a blazed grating structure includes cutting a substrate off-axis, depositing a first layer on the substrate, and depositing a resist layer on the first layer. The resist layer includes a pattern. The method also includes etching the first layer in the pattern using the resist layer as a mask. The pattern includes a first region and a second region. The method further includes creating the binary grating structure in the substrate in the second region and creating the blazed grating structure in the substrate in the first region.
A method of manufacturing a waveguide having a combination of a binary grating structure and a blazed grating structure, the method comprising:
Dependencies are inferred from the claim text.