Asymmetrical magnification inspection system and illumination module

An inspection system that comprises

• a detector;
• collection optics;
• an illumination module that is detachably connected to a structural element of the inspection system;
• multiple telescopes that are held by a turret and are positioned between the illumination module and an object;
• wherein the illumination module comprises:
• a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism;
• wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis;
• a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam;
• and
• additional optics for optically manipulating the third radiation beam to provide an impinging radiation beam that impinges onto the object;
• and
• wherein the collection optics is configured to direct a reflected radiation beam towards the detector;
• wherein the reflected radiation beam is reflected from the object as a result of illuminating of the object with the impinging radiation beam.

A method for illuminating an object, the method comprises:

• setting an asymmetrical magnification of a pair of anamorphic prisms by rotating, by a rotating mechanism, at least one of a first anamorphic prism and a second anamorphic prism of the pair of anamorphic prisms;
• illuminating, with a first radiation beam, the pair of anamorphic prisms;
• wherein the first radiation beam propagates along a first optical axis;
• asymmetrically magnifying, by the pair of anamorphic prisms, the first radiation beam in one dimension to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis;
• and
• laterally shifting, by a rectangular prism, the second radiation beam to provide a third radiation beam, wherein the pair of anamorphic prisms is configured to introduce a lateral shift between the first radiation beam and the second radiation beam, and wherein the lateral shift introduced by the rectangular prism is configured to compensate for the lateral shift introduced by the pair of anamorphic prisms.