Measuring device
AssigneeYokogawa Electric Corporation
InventorsKazuki Setsuda, Naomichi Chida
Life of this patent
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Abstract
A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.
Claims17
A measuring device comprising:
- an irradiator that irradiates electromagnetic waves to an inspection object;
- a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object;
- a detector comprising a light receiving sensor that detects the electromagnetic waves guided to the light-collecting surface;
- a processor that receives signals outputted from the detector and measures a characteristic of the inspection object based on the signals;
- and
- an inner-surface reflecting mirror that is polygonal and disposed between the irradiator and the inspection object,
- wherein a radius of an exit end of the light collector is equal to or less than a radius of a surface of the light receiving sensor, and
- wherein a length of a diagonal line that connects two opposite corners of the inner-surface reflecting mirror is equal to or smaller than a diameter of the incident end of the light collector.
Dependencies are inferred from the claim text.