Spectroscope and method for producing spectroscope
AssigneeHamamatsu Photonics K.K.
InventorsTakafumi Yokino, Katsumi Shibayama
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AssigneeHamamatsu Photonics K.K.
InventorsTakafumi Yokino, Katsumi Shibayama
Estimating the term…
A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.
A spectrometer comprising:
Dependencies are inferred from the claim text.