Method for inspecting flow rate controller and method for processing workpiece

A method for processing a workpiece by using a substrate processing apparatus,

• wherein the substrate processing apparatus comprises:
• a chamber body providing a chamber,
• a pressure gauge configured to measure a pressure in the chamber,
• an exhaust device configured to depressurize the chamber,
• a valve provided between the chamber body and the exhaust device, and
• a gas supply system configured to supply gas to the chamber, the gas supply system including one or more flow rate controllers which control a flow rate of gas,
• the method comprising:
• a first step of performing a continuous output of first gas at a flow rate corresponding to a first set flow rate designated in recipe data from a first flow rate controller, in a state where a control valve of the first flow rate controller among the one or more flow rate controllers is opened, after the chamber is depressurized by the exhaust device;
• a second step of closing the valve, in a state where the continuous output of the first gas from the first flow rate controller is performed;
• a third step of obtaining a first pressure rise characteristic representing a temporal change of a pressure value in the chamber due to the continuous output of the first gas from the first flow rate controller after the valve is closed in the second step;
• a fourth step of performing the intermittent output of the first gas from the first flow rate controller, by alternately repeating a first period of opening a control valve of the first flow rate controller for a first time length and a second period of closing the control valve of the first flow rate controller for a second time length such that the first gas is to be output at a flow rate according to the first set flow rate, the fourth step being performed after the chamber is depressurized by the exhaust device;
• a fifth step of closing the valve, in a state where the intermittent output of the first gas from the first flow rate controller is performed;
• a sixth step of obtaining a second pressure rise characteristic representing a temporal change of a pressure value in the chamber due to the intermittent output of the first gas from the first flow rate controller after the valve is closed in the fifth step;
• a seventh step of obtaining a third pressure rise characteristic representing a temporal change of a pressure value obtained by subtracting a temporal change of a pressure value of the chamber when the valve and the control valve are closed, from a temporal change of a pressure value specified by the first pressure rise characteristic;
• an eighth step of obtaining a fourth pressure rise characteristic representing a temporal change of a pressure value obtained by subtracting a temporal change of a pressure value of the chamber when the valve and the control valve are closed, from a temporal change of a pressure value specified by the second pressure rise characteristic;
• a ninth step of obtaining a first required time required from a start of the continuous output of the first gas from the first flow rate controller until a predetermined pressure is reached, from a temporal change of a pressure value specified by the third pressure rise characteristic;
• a tenth step of obtaining a second required time required from a start of the intermittent output of the first gas from the first flow rate controller until the predetermined pressure is reached, from a temporal change of a pressure value specified by the fourth pressure rise characteristic;
• an 11th step of obtaining an estimated time from a start of the intermittent output of the first gas from the first flow rate controller until the predetermined pressure is reached, in a case where the intermittent output of the first gas is performed in the fourth step assuming that there is no delay time in the intermittent output of the first gas from the first flow rate controller;
• a 12th step of obtaining a parameter representing a difference between the estimated time obtained in the 11th step and the second required time;
• a 13th step of adjusting at least one of the first time length, the second time length, and the first set flow rate, which are included in the recipe data, such that a difference between the parameter obtained in the 12th step and a reference value decreases;
• and
• a 14th step of performing the intermittent output of the first gas from the first flow rate controller and processing the workpiece in the chamber by the output first gas, by alternately repeating the first period and the second period, according to recipe data in which at least one of the first time length, the second time length, and the first set flow rate is adjusted in the 13th step.

A method for inspecting a flow rate controller which adjusts a flow rate of gas to be supplied to a chamber of a substrate processing apparatus,

• wherein the substrate processing apparatus comprises:
• a chamber body providing the chamber,
• a pressure gauge configured to measure a pressure in the chamber,
• an exhaust device configured to depressurize the chamber,
• a valve provided between the chamber body and the exhaust device, and
• a gas supply system configured to supply gas to the chamber, the gas supply system including the flow rate controller which outputs gas at a flow rate corresponding to a designated set flow rate,
• the method comprising:
• a first step of performing a continuous output of gas at the flow rate corresponding to the set flow rate from the flow rate controller, in a state where a control valve of the flow rate controller is opened, after the chamber is depressurized by the exhaust device;
• a second step of closing the valve, in a state where the continuous output of gas is performed;
• a third step of obtaining a first pressure rise characteristic representing a temporal change of a pressure value in the chamber due to the continuous output of gas after the valve is closed in the second step;
• a fourth step of performing an intermittent output of gas from the flow rate controller by alternately repeating a first period of opening the control valve for a first time length and a second period of closing the control valve for a second time length such that gas is to be output at a flow rate corresponding to the set flow rate, the fourth step being performed after the chamber is depressurized by the exhaust device;
• a fifth step of closing the valve, in a state where the intermittent output of the gas is performed;
• a sixth step of obtaining a second pressure rise characteristic representing a temporal change of a pressure value in the chamber due to the intermittent output of the gas after the valve is closed in the fifth step;
• a seventh step of obtaining a first required time required from a start of the continuous output of gas by the flow rate controller until a predetermined pressure is reached, from a temporal change of a pressure value specified by the first pressure rise characteristic;
• an eighth step of obtaining a second required time required from a start of the intermittent output of the gas by the flow rate controller until the predetermined pressure is reached, from a temporal change of a pressure value specified by the second pressure rise characteristic;
• a ninth step of obtaining an estimated time from a start of the intermittent output of the gas by the flow rate controller until the predetermined pressure is reached, in a case where the intermittent output of the gas is performed in the fourth step assuming that there is no delay time for intermittent supply of gas by the flow rate controller;
• and
• a tenth step of obtaining a parameter representing a difference between the estimated time and the second required time.