Continuous distillation trichlorosilane vaporization supply apparatus

A continuous distillation trichlorosilane vaporization supply apparatus comprising:

• an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane;
• a carrier hydrogen gas supply pipe connected to the evaporator;
• and
• a condenser that condenses liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas,
• wherein a center line of the evaporator and a center line of the condenser are not on the same line,
• a lower end of the condenser has a structure that directly communicates with a lower end of the evaporator through a pipe,
• an upper end of the condenser is provided with a gas feeding pipe,
• the liquid trichlorosilane passes through a trichlorosilane replenishing valve and replenishes the evaporator,
• the carrier hydrogen gas supply pipe and the trichlorosilane supply valve are different structures,
• the upper end of the condenser is provided with a distribution plate that distributes the trichlorosilane-hydrogen mixed gas that has passed through the condenser to a plurality of devices, and
• an inside of a single condenser is divided in plural sections.