Delivery container with flow distributor

A system for delivering a chemical precursor to a process tool, comprising:

• the chemical precursor selected from the group consisting of metal halides, metal β-diketonates, metal β-diketoesterates, metal β-ketoiminates, metal β-diiminates, metal alkyls, metal carbonyls, alkyl metal carbonyls, metal cyclopentadienyls, metal cyclopentadienyls carbonyls, metal pyrrolyls, metal imidazolyls, metal amidinates, metal alkoxides, and combinations thereof;
• wherein
• the metal is selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Ce, Sm, Tb, Er, Yb, Lu, Ti, Zr, Hf, Fe, Co, Ni, Ru, Ir, Rh, Cu, Al, Sn, Pb, Sb, Bi, Te, Cr, Mo Ta, and W;
• a container containing the chemical precursor;
• comprising:
• sidewall,
• a base,
• a lid having a flat surface,
• an inlet tube,
• a hollow flow distributor comprising a plurality of small openings as jets, and
• an outlet passing through the lid;
• wherein
• the inlet tube passes through the lid and extended into the flow distributor, and is in fluid communication with the flow distributor,
• the jets are facing the base at an angle ranging from 60 to 90 degrees to the lid,
• tip of each jet is located with a distance of greater or equal to 0.5 inches from the chemical precursor the jet is facing,
• each jet has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.25 inches (0.64 cm);
• and
• the hollow flow distributor has hollow bars and a hollow showerhead, the hollow showerhead is centered in the hollow flow distributor with the hollow bars extended from the hollow showerhead parallel to the lid, the hollow showerhead is in fluid communication with the hollow bars.