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US 10,480,066 B2Granted
Metal deposition methods
AssigneeApplied Materials, Inc.
InventorsYong Wu, Srinivas Gandikota, Abhijit Basu Mallick
Life of this patent
Estimating the term…
Abstract
A method of forming conformal amorphous metal films is disclosed. A method of forming crystalline metal films with a predetermined orientation is also disclosed. An amorphous nucleation layer is formed on a substrate surface. An amorphous metal layer is formed from the nucleation layer by atomic substitution. A crystalline metal layer is deposited on the amorphous metal layer by atomic layer deposition.
Claims16
A method of forming an amorphous metal layer, the method comprising:
- exposing a substrate surface of a substrate material to a nucleation precursor to form a conformal amorphous nucleation layer, the nucleation precursor comprising a silicon precursor with a general formula of SiaHbXc, where each X is a halogen independently selected from F, Cl, Br and I, a is any integer greater than or equal to 1, b and c are each less than or equal to 2a+2 and b+c is equal to 2a+2;
- and
- converting the conformal amorphous nucleation layer to a conformal amorphous metal layer by substituting atoms of the conformal amorphous nucleation layer with metal atoms from a metal precursor.
A method of forming an amorphous metal layer, the method comprising:
- exposing a substrate surface of a substrate material to a nucleation precursor to form a conformal amorphous nucleation layer, the nucleation precursor comprising a boron precursor with a general formula of BdHeXfRg, where each X is a halogen independently selected from F, Cl, Br and I, each R is an independently selected C1-C4 alkyl group, d is any integer greater than or equal to 1, each of e, f and g is less than or equal to d+2 and e+f+g is equal to d+2;
- and
- converting the conformal amorphous nucleation layer to a conformal amorphous metal layer by substituting atoms of the conformal amorphous nucleation layer with metal atoms from a metal precursor.
Dependencies are inferred from the claim text.