Gas distribution for chemical vapor deposition/infiltration
AssigneeGoodrich Corporation
InventorsYing She, Naveen G. Menon, Zissis A. Dardas, Thomas P. Filburn, Xiaodan Cai
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AssigneeGoodrich Corporation
InventorsYing She, Naveen G. Menon, Zissis A. Dardas, Thomas P. Filburn, Xiaodan Cai
Estimating the term…
A gas distribution plate for a chemical vapor deposition/infiltration system includes a body having a first side and a second side opposite the first side. The body may be hollow and may define an internal cavity. The gas distribution plate may also include a plurality of pass-through tubes extending through the internal cavity, a cavity inlet, and a plurality of cavity outlets. A reaction gas may be configured to flow through the plurality of pass-through tubes and a gaseous mitigation agent may be configured to flow into the internal cavity via the cavity inlet and out of the internal cavity via the plurality of cavity outlets to mix with reaction gas.
A gas distribution plate for a chemical vapor deposition/infiltration system, the gas distribution plate comprising:
Dependencies are inferred from the claim text.