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US 10,479,094 B2Granted
Energy efficient printheads
AssigneeHewlett-Packard Development Company, L.P.
InventorsZhizhang Chen, Mohammed Shaarawi, Brian Bolf, Paul Krause
Life of this patent
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Abstract
Energy efficient printheads are disclosed. An example printhead includes a substrate with channels to direct ink toward a plurality of nozzles of the printhead. The example printhead further includes a passivation layer on the substrate. The passivation layer includes a first thin film of a first dielectric material formed using atomic layer deposition.
Claims19
A printhead comprising:
- a substrate with channels to direct ink toward a plurality of nozzles of the printhead;
- and
- a passivation layer on the substrate, the passivation layer including a first thin film of a first dielectric material and a second thin film of a second dielectric material, wherein the first thin film is in direct contact with the second thin film.
A printhead, comprising:
- a substrate to direct ink to nozzles in the printhead to eject the ink;
- and
- a passivation layer to protect the substrate, the passivation layer including:
- a first thin film of a first dielectric material on the substrate having a step coverage greater than or equal to 80%.
1 more element
A method, comprising:
- forming a first thin film of a first dielectric material on a substrate having channels to direct ink toward a plurality of nozzles of a printhead, wherein the first thin film is formed using atomic layer deposition;
- and
- forming a second thin film of a second dielectric material on the first thin film using plasma-enhanced chemical vapor deposition, wherein the first and second thin films are in direct contact.
Dependencies are inferred from the claim text.