US 10,479,083 B2Granted

Peeling method of cover member and manufacturing method of liquid ejecting head

AssigneeSeiko Epson Corporation

InventorTatsuro Hotta

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Abstract

Disclosed is a peeling method of a cover member including forming a recessed portion that opens one side surface of a substrate, on a region different from a region in which a pattern is formed and forming an opening region including the opening of the recessed portion; attaching the cover member so as to cover the one side surface; adjusting a pressure for increasing a pressure within a space formed by the recessed portion and the cover member by attaching the cover member to the substrate to be higher than a pressure on a side opposite to the space with the cover member interposed therebetween; and peeling off the cover member from the substrate, in a state where the pressure within the space is increased by the adjusting of the pressure.

Claims18

Dependent claims

A method for peeling a cover member off of a substrate, the method comprising:

forming a recessed portion that opens to one side surface of a substrate, wherein the recessed portion does not completely penetrate the substrate and is formed in a region of the substrate different from a region in which a pattern is formed in the substrate, and forming an opening region including the opening of the recessed portion, on the one side surface of the substrate;
attaching the cover member so as to cover the one side surface of the substrate including the opening region and the pattern;
adjusting a pressure for increasing a pressure within a space formed by the recessed portion and the attached cover member to be higher than a pressure on a side opposite to the space with the cover member interposed therebetween;
and
peeling off the cover member from the substrate, in a state where the pressure within the space is increased by the adjusting of the pressure.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/830,384Filed 4 Dec 2017
Priority: JP 2016-24164813 Dec 2016
Published: US 2018/0162131 A114 Jun 2018
Granted: 19 Nov 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification36 codes

B32B 3/266
Characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or…
B41J 2/1607
Production of nozzles: production of print heads with piezoelectric elements
B32B 3/30
Characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or…
B32B 7/06
Interconnection of layers: permitting easy separation

Family

US 2018/0162131 A1Pre-grant publication · published 14 Jun 2018
US 10,479,083 B2This patent

From the US filing history. Foreign family members aren’t listed.

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