Method and apparatus for surface nanoparticle measurement

A particle collection apparatus for counting particles present on a processing tool component, the apparatus comprising:

• a particle collector configured to collect particles from the processing tool component, the particle collector comprising:
• a body;
• a probe head coupled to the body, the probe head having a probe body and a controlled spacing element, wherein the controlled spacing element is coupled to the probe body and is configured to form a manifold between the probe body and the processing tool component, wherein the controlled spacing element is a filter ring having a plurality of holes, and wherein the plurality of holes are distributed asymmetrically around the circumference of the filter ring to create a turbulent gas flow;
• and
• an ionizer mesh ring disposed in the manifold;
• and
• a counter configured to count particles from a surface of the processing tool component.

A particle collection apparatus for counting particles present on a processing tool component, the apparatus comprising:

• a particle collector configured collect particles from the processing tool component, the particle collector comprising:
• a body;
• and
• a probe head coupled to the body, the probe head having a probe body and a controlled spacing element, wherein the controlled spacing element is coupled to the probe body and is configured to form a manifold between the probe body and the processing tool component, wherein the controlled spacing element is a filter ring;
• and
• an ionizer mesh ring disposed in the manifold;
• a counter configured to collect particles from a surface of the processing tool component;
• a test bench, wherein the particle collector is disposed over the test bench;
• and
• a power source coupled to the test bench, the power source configured to excite particles from the surface of the processing tool component.