Piezoelectric transducers using micro-dome arrays

A piezoelectric transducer, comprising:

• a vibrating element comprising a drive electrode, a reference electrode, and a piezoelectric element disposed between the drive electrode and the reference electrode;
• and
• a base supporting the vibrating element on a first surface of the base and including integrated circuitry electrically connected to the drive electrode and the reference electrode of the vibrating element,
• wherein the drive electrode, the reference electrode, and the piezoelectric element each include a respective flexible portion and a respective stationary portion connected to the respective flexible portion,
• wherein the flexible portions of the drive electrode, reference electrode, and piezoelectric element are suspended over a same area of the first surface and are curved in a first direction relative to the first surface of the base in the absence of an applied voltage between the drive electrode and the reference electrode,
• wherein the flexible portions of the reference electrode, drive electrode, and piezoelectric element deflect in response to a driving voltage applied between the drive electrode and the reference electrode,
• wherein the transducer has an exposed outer surface facing a direction pointing from the base to the vibrating element, and the exposed outer surface of the transducer includes an outer surface of the vibrating element or an outer surface of a flexible film covering the outer surface of the vibrating element, and
• wherein the exposed outer surface of the transducer device deflects in conformity with the deflection of the flexible portions of the reference electrode, drive electrode, and piezoelectric element,
• wherein the base has a cavity formed in the first surface, and the flexible portions of the reference electrode, drive electrode, and piezoelectric element are suspended over the cavity.