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US 10,478,752 B2Granted
Chemical liquid tank
AssigneeToshiba Memory Corporation
InventorMasato Kurita
Life of this patent
Estimating the term…
Abstract
A chemical liquid tank has a container to store chemical liquid, a sensor to measure a height of a liquid surface by irradiating the chemical liquid stored in the container with an ultrasonic wave and measuring time until a reflected wave reflected from the liquid surface of the chemical liquid is received, and a gas jetting port to spray a gas toward a part of the liquid surface comprising an irradiation position of the ultrasonic wave in the container.
Claims8
A chemical liquid tank, comprising:
- a container to store chemical liquid;
- a sensor to measure a height of a liquid surface of the chemical liquid stored in the container based on a time after irradiating the chemical liquid stored in the container with an ultrasonic wave and before sensing a reflected wave reflected from the liquid surface of the chemical liquid;
- and
- a gas jetting port including a plurality of nozzles to jet a gas from the plurality of nozzles toward a part of the liquid surface, the part of the liquid surface comprising an irradiation position of the ultrasonic wave in the container;
- and
- a guide member provided inside an outer wall surface of the container and to guide bubbles generated in the container,
- wherein the sensor measures the height of the liquid surface when the bubbles generated in the container are removed from the irradiation position of the liquid surface by jetting the gas toward the part of the liquid surface.
4 more elements
Dependencies are inferred from the claim text.