US 10,475,674 B2Granted

Light irradiation type heat treatment apparatus and method for manufacturing heat treatment apparatus

AssigneeSCREEN Holdings Co., Ltd.

InventorsNobuhiko Nishide, Hiroshi Miyake

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Abstract

A sealing structure is achieved by sandwiching an O ring between an upper chamber window and a chamber side portion and pressing a clamping ring against a top of a peripheral portion of the upper chamber window. Grooving is performed on a lower surface and an upper surface of the peripheral portion of the upper chamber window, to thereby form a plurality of grooves thereon. Flash light traveling into the peripheral portion of the upper chamber window during irradiation with flash light is reflected by the plurality of grooves and is prevented from traveling toward the O ring. This significantly reduces an amount of flash light reaching the O ring, and thus degradation of the O ring due to the irradiation with the flash light can be prevented.

Claims1

Dependent claims

A heat treatment apparatus that irradiates a substrate with flash light to heat the substrate, comprising:

a chamber housing the substrate;
a retainer configured to retain the substrate in the chamber;
an exhaust configured to exhaust the chamber and to reduce an inside pressure in the chamber to less than atmospheric pressure;
a flash lamp provided outside the chamber and on one side of the chamber;
a quartz window covering an opening of the one side of the chamber;
an O ring sandwiched between a side wall of the chamber and a contact surface of a peripheral portion of the quartz window;
and
a window retainer configured to press a counter surface opposed to the contact surface of the peripheral portion of the quartz window against the side wall of the chamber,
wherein a step is provided in the contact surface of the quartz window, and an opaque quartz that contacts the O ring is provided in the step.

6 more elements

Dependencies are inferred from the claim text.