Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
AssigneeEbara Corporation
InventorTomoatsu Ishibashi
Life of this patent
Estimating the term…
Abstract
A roll-type cleaning member for scrubbing and cleaning a target cleaning surface of a substrate includes a plurality of nodules formed on a surface thereof. Each nodule includes a slit which extends so as not to be parallel to the rotation direction of the roll-type cleaning member, upstream edges are formed by the slit so as to serve as edges first contacting the target cleaning surface when a cleaning surface of the nodule contacts the target cleaning surface of the substrate by the rotation of the roll-type cleaning member, and the upstream edges are provided at a plurality of positions of the cleaning surface of the nodule in the circumferential direction.
Claims21
A roll-type processing member for processing a surface of a substrate by scrubbing the surface of the substrate, comprising:
- a nodule which is formed on a surface of the roll-type processing member,
- wherein the nodule includes a plurality of upstream edges which are provided in the rotation direction of the roll-type processing member, the plurality of upstream edges being edges located at the upstream sides of a front end surface of the nodule when the front end surface contacts the surface of the substrate by the rotation of the roll-type processing member, and
- wherein the nodule includes a slit or a concave portion that is formed on the front end surface of the nodule, wherein a height of a depth of the slit or the concave portion is less than a height of the nodule on either side of the slit or the concave portion.
A roll-type processing member for processing a surface of a substrate by scrubbing the surface of the substrate, comprising:
- a nodule which is formed on a surface of the roll-type processing member,
- wherein the nodule includes a slit or a concave portion which extends so as not to be parallel to the rotation direction of the roll-type processing member, wherein a height of a depth of the slit or the concave portion is less than a height of the nodule on either side of the slit or the concave portion.
A roll member for processing a surface of a substrate by contacting the surface of the substrate, comprising:
- a nodule on a surface of the roll member,
- wherein the nodule comprises at least a first edge portion and a second edge portion,
- a groove portion is formed adjacent to the first edge portion and the second edge portion,
- the groove portion has a width and a depth which do not completely close by deformation of the nodule contacting the substrate, wherein a height of the depth of the groove portion is less than a height of the nodule on either side of the groove portion,
- the nodule is divided by the groove portion so as to form the first edge portion and the second edge portion.
A roll member for processing a surface of a substrate by scrubbing the surface of the substrate, comprising:
- a nodule on a surface of the roll member,
- wherein the nodule comprises a slit or a concave portion extending non-parallel to a rotation direction of the roll member to divide the nodule to form a first edge portion and a second edge portion, wherein a height of a depth of the slit or the concave portion is less than a height of the nodule on either side of the slit or the concave portion,
- each of the first edge portion and the second edge portion is configured to be able to face-contact the substrate at a substantially identical height with respect to each other to the slit or the concave portion when contacting the substrate.
A roll member for processing a surface of a substrate by scrubbing the surface of the substrate, comprising:
- a nodule on a surface of the roll member,
- wherein the nodule comprises a slit or a concave portion extending non-parallel to a rotation direction of the roll member to divide the nodule to form a first edge portion and a second edge portion, wherein a height of a depth of the slit or the concave portion is less than a height of the nodule on either side of the slit or the concave portion, and
- the slit or the concave portion is bent in a convex shape in the rotation direction of the roll member.
Dependencies are inferred from the claim text.