Lamp cross-section for reduced coil heating
AssigneeApplied Materials, Inc.
InventorJoseph M. Ranish
Life of this patent
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Abstract
Embodiments of apparatus for providing radiant energy in the form of electromagnetic radiation are provided herein. In some embodiments a radiation source for electromagnetic radiation includes a tubular body formed from a material transparent to electromagnetic radiation; a filament disposed within the tubular body; and a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament.
Claims20
A radiation source for electromagnetic radiation in a substrate processing system, comprising:
- a tubular body formed from a material transparent to electromagnetic radiation, wherein the tubular body has an upper portion and a lower portion;
- a filament sealed within the tubular body, wherein the upper portion and the lower portion are on opposite sides of a horizontal axis;
- and
- a reflective coating disposed only on the lower portion of the tubular body to form a reflective portion, wherein the reflective portion is asymmetrical about a vertical axis through the filament and perpendicular to the horizontal axis and is configured to direct reflections of electromagnetic radiation emanating from the filament during use away from the filament.
A lamp tube, comprising:
- a tubular body formed from a material transparent to electromagnetic radiation comprising a reflective portion having a reflective coating wherein the reflective portion is configured to direct reflections of incident electromagnetic radiation emanating from a source during use away from the source, wherein a lower portion of the reflective portion of the tubular body is asymmetrical about a vertical axis through the source and perpendicular to a horizontal axis through end points of the reflective portion.
A substrate processing system comprising:
- a chamber enclosing a processing volume;
- a support having a substrate support surface adapted to support a substrate within the processing volume;
- a circular lamp comprising a tubular body formed from a material transparent to electromagnetic radiation;
- a filament disposed within the tubular body;
- and
- a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to direct reflections of electromagnetic radiation emanating from the filament during use away from the filament, wherein the reflective portion of the tubular body is asymmetrical to a non-reflective portion of the tubular body, and wherein a center point of the filament forms an intersection point of an axis through the circular lamp with the reflective portion and the non-reflective portion on opposite sides of the axis.
Dependencies are inferred from the claim text.