Extreme ultraviolet light generation device

An extreme ultraviolet light generation device comprising:

• a chamber having a first through-hole that allows a pulse laser beam to enter the chamber;
• a target supply unit held by the chamber and configured to output a droplet target toward a predetermined region in the chamber;
• a shield member surrounding the predetermined region in the chamber and having a target path that allows the droplet target outputted from the target supply unit to pass toward the predetermined region;
• and
• a tubular member surrounding at least a part of an upstream portion of the trajectory of the droplet target outputted from the target supply unit toward the predetermined region, the upstream portion being upstream from the target path of the shield member,
• the tubular member being fixed to the chamber with a gap between the tubular member and the shield member.

An extreme ultraviolet light generation device comprising:

• a chamber having a first through-hole that allows a pulse laser beam to enter the chamber;
• a target supply unit held by the chamber and configured to output a droplet target toward a predetermined region in the chamber;
• a shield member surrounding the predetermined region in the chamber and having a target path that allows the droplet target outputted from the target supply unit to pass toward the predetermined region;
• a tubular member surrounding at least a part of an upstream portion of the trajectory of the droplet target outputted from the target supply unit toward the predetermined region, the upstream portion being upstream from the target path of the shield member;
• and
• a trajectory adjusting mechanism configured to adjust a trajectory of the droplet target in a first direction substantially perpendicular to the trajectory and in a second direction substantially perpendicular to both of the trajectory and the first direction, wherein
• the tubular member has a rectangular section, the rectangular section having first and third edges substantially parallel to the first direction and second and fourth edges substantially parallel to the second direction.