Rapid thermal processing chamber with linear control lamps

A system for thermal processing of a substrate comprising:

• a substrate support;
• a housing positioned over the substrate support and having a first edge surrounding a first plane;
• and
• an arrangement of lamps located within the housing and disposed across an area facing the first plane, the area defined by a boundary, wherein the arrangement comprises a plurality of segmented lamps, each segmented lamp having a bulb extending linearly from a location on the boundary to an opposing location on the boundary, wherein each segmented lamp includes a midpoint, a first filament on a first side of the midpoint, a second filament on a second side of the midpoint, a first wire segment extending between a location on the boundary and the first filament, and a second wire segment extending between a location on the boundary and the second filament, wherein:
• the first filament extends from a first endpoint to a second endpoint,
• the second filament extending from a first endpoint to a second endpoint,
• the plurality of segmented lamps includes a first segmented lamp and a second segmented lamp,
• the first wire segment and the second wire segment of the first segmented lamp are configured to overlie an edge of the substrate disposed on the substrate support, the substrate having an outer ring-shaped zone in which the edge of the substrate is located and an inner ring-shaped zone, the outer ring-shaped zone surrounding the inner ring-shaped zone,
• the first endpoint and the second endpoint of the first filament and the second filament of the first segmented lamp are configured to overlie the inner ring-shaped zone of the substrate disposed on the substrate support, and
• the first endpoint and the second endpoint of the first filament and the second filament of the second segmented lamp are configured to overlie the outer ring-shaped zone of the substrate disposed on the substrate support.

A thermal processing chamber for processing a substrate comprising:

• one or more side walls surrounding a processing region;
• a substrate support within the processing region, the substrate support having a substrate supporting surface;
• a transparent window disposed above the one or more side walls;
• and
• a lamphead disposed above the transparent window;
• the lamphead comprising a housing;
• and
• a plurality of segmented lamps disposed within the housing, each segmented lamp aligned parallel to the substrate supporting surface of the substrate support, wherein each segmented lamp comprises:
• a first end connected to a first location on the housing;
• a first wire segment connected to the first end;
• a first filament connected to the first wire segment, the first filament extending from a first endpoint to a second endpoint;
• an intermediate wire segment connected to the first filament;
• a second filament connected to the intermediate wire segment, the second filament extending from a first endpoint to a second endpoint;
• a second wire segment connected to the second filament;
• a second end connected to the second wire segment;
• and
• a bulb extending linearly from the first end to the second end, wherein
• the second end is connected to a second location on the housing,
• each segmented lamp is connected to a separate first location and a separate second location on the housing,
• the plurality of segmented lamps includes a first segmented lamp and a second segmented lamp,
• the first wire segment and the second wire segment of the first segmented lamp are configured to overlie an edge of the substrate disposed on the substrate support, the substrate having an outer ring-shaped zone in which the edge of the substrate is located and an inner ring-shaped zone, the outer ring-shaped zone surrounding the inner ring-shaped zone, and
• the first endpoint and the second endpoint of the first filament and the second filament of the first segmented lamp are configured to overlie the inner ring-shaped zone of the substrate disposed on the substrate support, and
• the first endpoint and the second endpoint of the first filament and the second filament of the second segmented lamp are configured to overlie the outer ring-shaped zone of the substrate disposed on the substrate support.