Simplified lamp design
AssigneeApplied Materials, Inc.
InventorJoseph M. Ranish
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
Claims9
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
- an insulative sleeve coupled to the press seal, the insulative sleeve comprising:
- a first mating extension that is snap fit into a first groove formed in the press seal, a second mating extension that is snap fit into a second groove formed in a first conductive pin;
- and
- a third mating extension that is snap fit into a third groove formed in a second conductive pin, wherein the first lead and the second lead extend into the insulative sleeve;
- a first fuse electrically coupling the first lead to the first conductive pin;
- and
- a second fuse electrically coupling the second lead to the second conductive pin.
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
- a first insulative sleeve coupled to the first lead via a threaded connection external to the press seal;
- a first conductive cap or pin coupled to the first insulative sleeve;
- a first fuse electrically coupling the first lead to the first conductive cap or pin;
- a second insulative sleeve coupled to the second lead external to the press seal;
- a second conductive cap or pin coupled to the second insulative sleeve;
- and
- a second fuse electrically coupling the second lead to the second conductive cap or pin.
Dependencies are inferred from the claim text.