Force detection device and robot
AssigneeSeiko Epson Corporation
InventorsYoshiteru Nishimura, Nobuyuki Mizushima, Toshiyuki Kamiya, Hiroki Kawai
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Abstract
To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.
Claims9
A force detection device comprising:
- a base plate including a plate-shaped first member, and a second member attached to the first member;
- a cover plate including a third and a fourth member;
- and
- a sensor device positioned between the base plate and cover plate, and having a piezoelectric element contained in a package;
- wherein the first member and the third member do not directly contact the sensor device,
- a material forming the first member is different from a material forming the second member,
- the second member protrudes in a direction toward the cover plate,
- a coefficient of linear expansion of the material forming the second member is smaller than a coefficient of linear expansion of the material forming the first member,
- a density of the material forming the first member is smaller than a density of the material forming the second member,
- a coefficient of linear expansion of a material which forms the fourth member is smaller than a coefficient of linear expansion of a material which forms the third member, and
- a density of the material which forms the third member is smaller than a density of the material which forms the fourth member.
Dependencies are inferred from the claim text.