Cleaning apparatus and cleaning method

A cleaning apparatus comprising:

• a substrate cleaner having a core, a member body and a group of protrusions, the member body being fixed to the core and being placed over a first region to be in touch with a front surface of a substrate and a second region different from the first region, the group of protrusions being attached on an outer surface of the member body over the first region and the second region, the core rotating around a first rotation axis, the first rotation axis extending along a first horizontal direction, the rotation of the core causing the group of protrusions to be moved substantially along a vertical direction when being in touch with a front surface of a substrate in the first region;
• a member cleaner placed adjacent to the second region;
• a holding mechanism having a chuck and a rotation shaft, the chuck holding a back surface of the substrate in the vertical direction, the rotation shaft supporting the chuck, the rotation shaft rotating around a second rotation axis, the second rotation axis extending along a second horizontal direction, the second horizontal direction intersecting with the first horizontal direction;
• a first vibrating mechanism that vibrates the rotation shaft along the vertical direction;
• a second vibrating mechanism that vibrates the core along the vertical direction;
• and
• a controller that controls a synchronous vibration, wherein the vibration by the first vibrating mechanism and the vibration by the second vibrating mechanism are performed in opposite orientations along the vertical direction.