Electron probe microanalyzer and storage medium

A storage medium storing a data processing program used for an electron probe microanalyzer, which includes an electron probe irradiation unit generating an X-ray by irradiating a sample with an electron probe, an energy dispersive X-ray spectrometer acquiring first spectrum data by detecting the X-ray generated from the sample, and a wavelength dispersive X-ray spectrometer acquiring second spectrum data by detecting the X-ray generated from the sample, the medium allowing a computer to function as:

• a phase distribution map generation processing unit generating a phase distribution map of a substance of the sample in a measurement region, on the basis of the first spectrum data acquired with respect to each pixel in the measurement region on a sample surface;
• and
• a composition information acquisition processing unit acquiring element composition information of each phase, on the basis of the second spectrum data acquired with respect to a position on the sample corresponding to a representative pixel in the measurement region corresponding to each of the phases of the phase distribution map.