Substrate processing apparatus, substrate processing method and storage medium

A substrate processing apparatus, comprising:

• a substrate processing unit including a plurality of processing chambers each configured to perform a process on a substrate;
• a mounting unit configured to mount thereon at least one carrier, each carrier comprising substrates to be processed;
• wherein the substrates of each carrier are processed in accordance with a processing recipe;
• wherein each carrier possesses a first substrate number, the first substrate number indicating the number of substrates to be processed per unit time in the substrate processing unit according to the processing recipe;
• a substrate transfer device provided between the mounting unit and the processing chambers, wherein the substrate transfer device comprises a transfer arm holding the substrate;
• and
• a computer having:
• a memory which stores a plurality second substrate numbers, each second substrate number indicating the number of substrates capable of being processed per unit time in the substrate processing unit for a given operating speed of the substrate transfer device;
• and
• wherein the memory stores a mapping table that correlates each of the plurality of second substrate numbers with a respective operating speed of the substrate transfer device, and
• a controller configured to:
• compare a first substrate number with each of the plurality of second substrate numbers in the mapping table,
• when the first substrate number is not equal to the second substrate number, select, from the mapping table, a smallest second substrate number from the plurality of second substrate numbers that is larger than the first substrate number;
• and
• control the substrate transfer device based on the operating speed in the mapping table which corresponds to the smallest second substrate number.