Deposition apparatus and method of manufacturing organic light-emitting diode display apparatus using the same
AssigneeSamsung Display Co., Ltd.
InventorJeongwon Han
Life of this patent
Estimating the term…
Abstract
A deposition apparatus includes a chamber, a stage, a mask, a chuck, a deposition source, a laser generator, and an optical assembly. The stage is supported in the chamber. The mask is disposed on the stage. The mask includes a deposition pattern. The chuck is configured to support a substrate in the chamber. The chuck is configured to position the substrate to overlap the deposition pattern. The deposition source is disposed in the chamber. The deposition source is configured to provide a deposition material toward the substrate. The laser generator is configured to generate a laser beam. The optical assembly is configured to guide the laser beam between the mask and the substrate.
Claims20
A deposition apparatus comprising:
- a chamber;
- a stage supported in the chamber;
- a mask supported in the chamber via the stage, the mask comprising:
- a mass forming a body;
- and
- a plurality of openings forming a deposition pattern in the body;
- a chuck configured to support a substrate in the chamber, the chuck being configured to position the substrate to overlap the deposition pattern;
- a deposition source disposed in the chamber, the deposition source being configured to provide deposition material toward the substrate;
- a laser generator configured to generate a laser beam;
- and
- at least one optical component configured to guide the laser beam between the mask and the substrate to mask a portion of the substrate from deposition material via the laser beam.
Dependencies are inferred from the claim text.