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US 10,381,258 B2Granted
Apparatus of processing workpiece in depressurized space
AssigneeTokyo Electron Limited
InventorsTakuya Umise, Hiroshi Sone, Naoyuki Suzuki
Life of this patent
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Abstract
In a processing apparatus according to one embodiment, a stage is installed inside a process chamber. The stage has a plurality of through-holes formed therein, which corresponds to a plurality of lift pins. The plurality of lift pins is supported by a spline shaft through a support body. The spline shaft is supported by a spline bearing such that the spline shaft is vertically moved. The plurality of lift pins is biased upward by a spring member through the spline shaft. The spline shaft, the spline bearing, and the spring member are installed in an outer space separated from a depressurizable inner space of the process chamber.
Claims13
A processing apparatus of processing a workpiece in a depressurized space, comprising:
- a process chamber having a depressurizable inner space;
- a stage configured to be vertically movable inside the process chamber and having a plurality of through-holes formed to penetrate from an upper surface up to a lower surface of the stage;
- a support body installed under the stage;
- a plurality of lift pins supported by the support body and extending upward from the support body, the plurality of lift pins being aligned with the plurality of through-holes, respectively, in a vertical direction;
- a spline shaft configured to extend in the vertical direction and supporting the support body thereon;
- a spline bearing configured to support the spline shaft such that the spline shaft is vertically moved;
- a spring member configured to bias the spline shaft upward;
- a vertically-extendible bellows configured to surround the spline shaft inside the process chamber and isolate the depressurizable inner space of the process chamber from an outer space of the process chamber including an inner space of the bellows;
- a restriction mechanism configured to restrict an upward movement of the plurality of lift pins from the upper surface of the stage, when an upper end of each of the plurality of lift pins protrudes from the upper surface of the stage;
- and
- a limiting part configured to limit an upward movement of the spline shaft when the stage is located at at least a predetermined position in the vertical direction or above the predetermined position,
- wherein the spline shaft, the spline bearing, and the spring member are installed in the outer space of the process chamber,
- the stage includes a convex portion spaced from the plurality of through holes and formed to extend downward from the lower surface of the stage,
- a lower end of the convex portion of the stage is configured to be brought into contact with the support body, and
- the restriction mechanism includes a combination of the convex portion of the stage and the support body.
12 more elements
A processing apparatus of processing a workpiece in a depressurized space, comprising:
- a process chamber having a depressurizable inner space;
- a stage configured to be vertically movable inside the process chamber and having a plurality of through-holes formed to penetrate from an upper surface up to a lower surface of the stage;
- a support body installed under the stage;
- a plurality of lift pins supported by the support body and extending upward from the support body, the plurality of lift pins being aligned with the plurality of through-holes, respectively, in a vertical direction;
- a spline shaft configured to extend in the vertical direction and supporting the support body thereon;
- a spline bearing configured to support the spline shaft such that the spline shaft is vertically moved;
- a spring member configured to bias the spline shaft upward;
- a vertically-extendible bellows configured to surround the spline shaft inside the process chamber and isolate the depressurizable inner space of the process chamber from an outer space of the process chamber including an inner space of the bellows;
- a restriction mechanism configured to restrict an upward movement of the plurality of lift pins from the upper surface of the stage, when an upper end of each of the plurality of lift pins protrudes from the upper surface of the stage;
- a limiting part configured to limit an upward movement of the spline shaft when the stage is located at at least a predetermined position in the vertical direction or above the predetermined position;
- a shaft coupled to the stage and configured to extend downward from the lower surface of the stage;
- and
- a drive device connected to the shaft outside the process chamber and configured to vertically move the stage and to rotate the stage around a central axis of the stage through the shaft,
- wherein the spline shaft, the spline bearing, and the spring member are installed in the outer space of the process chamber, and
- the restriction mechanism includes:
- a first member coupled to the shaft;
- and
- a second member coupled to the spline shaft and configured to extend a position under the first member, at which the second member is brought into contact with the first member.
15 more elements
Dependencies are inferred from the claim text.