US 10,375,773 B2Granted

Microwave heating apparatus

AssigneeShowa Denko K.K.

InventorsHiroshi Uchida, Kazuaki Senda, Mutsumi Yoshida

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Abstract

Provided is a microwave heating apparatus capable of effectively preventing the generation of sparks when an object containing a conductor (including a metal precursor such as a metal oxide) or a semiconductor is subjected to microwave heating. A microwave heating apparatus supplies a microwave so that the direction of the electrical flux line of the microwave is identical with the direction substantially parallel with a surface of a plate-like substrate and having thereon a pattern containing a conductor, a metal oxide, or a semiconductor, the substrate being arranged in the waveguide. The microwave heating apparatus also controls a pulse width of the microwave so that pulsed microwaves are supplied to the surface having the pattern thereon.

Claims5

Dependent claims

A microwave heating apparatus provided with:

a rectangular waveguide which is provided on one side, in the microwave travelling direction, with an iris unit, and on the other side with a movable short circuit unit;
a microwave supplying device which supplies a microwave so that the direction of the electrical flux line of the microwave is in parallel with a surface of a substrate, or the angle between the direction of the electrical flux line of the microwave and the surface of the substrate is maintained within 30 degrees, the substrate having thereon a pattern containing a conductor, a metal oxide, or a semiconductor, the substrate being arranged in the waveguide;
and
a control device which controls a pulse width of the microwave supplying device so that pulsed microwaves are supplied to the surface having the pattern thereon.

1 more element

Dependencies are inferred from the claim text.

Facts

Application: 14/430,598Filed 24 Sep 2013
Priority: JP 2012-21143225 Sep 2012
Published: US 2015/0223295 A16 Aug 2015
Granted: 6 Aug 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

H05B 6/707
Feed lines: using waveguides
H05B 6/705
Feed lines: using microwave tuning
H05B 6/78
Heating using microwaves: arrangements for continuous movement of material
H05B
Electric heating

Family

US 2015/0223295 A1Pre-grant publication · published 6 Aug 2015
US 10,375,773 B2This patent

From the US filing history. Foreign family members aren’t listed.

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