Temperature control apparatus, temperature control method and recording medium

A temperature control method of controlling a temperature of a processing target object, the temperature control method comprising:

• measuring a temperature distribution over an entire top surface of the processing target object;
• measuring, for each of preset divided areas into which the top surface of the processing target object is divided, an initial temperature of a portion in the each of preset divided areas;
• calculating, for each divided area, a median value of a temperature distribution of the each divided area, based on the temperature distribution over the entire top surface of the processing target object;
• calculating, for each divided area, a difference between the calculated median value and the measured initial temperature of the top surface of the processing target object in the portion, as an offset value;
• and
• controlling, for each divided area, a temperature of the each divided area such that a median value for controlled temperature becomes equal to a set temperature for processing of the processing target object, wherein the median value for controlled temperature is obtained based on the offset value and the temperature of the divided area.

A temperature control apparatus of controlling a temperature of a processing target object, the temperature control apparatus comprising:

• a first thermometer configured to measure a temperature distribution over an entire top surface of the processing target object;
• a second thermometer configured to measure, for each of preset divided areas into which the entire top surface of the processing target object is divided, an initial temperature of a portion in the each of preset divided areas;
• and
• at least one processor configured to:
• calculate, for each divided area, a median value of a temperature distribution of the each divided area, based on the temperature distribution over the entire top surface of the processing target object measured by the first thermometer,
• calculate, for each divided area, an offset value by calculating a difference between the calculated median value, and the initial temperature of the top surface of the processing target object in the portion, and
• control, for each divided area, a temperature of the each divided area such that a median value for controlled temperature becomes equal to a set temperature for processing of the processing target object, wherein the median value for controlled temperature is obtained based on the calculated offset value and the temperature of the each divided area measured by the second thermometer.