MEMS device and process

A MEMS transducer comprising a flexible membrane supported at a supporting edge relative to a substrate,

• the membrane comprising first and second unbound edges which each extend from an endpoint at, or near, first and second ends of the supporting edge respectively, a path segment being defined between first and second path points on each of the unbound edges, each path segment comprising at least two bendpoints at which the flexible membrane tends to bend in response to a given deflection of the flexible membrane, wherein a bendpoint of the first segment corresponds to a bendpoint of the second segment, said corresponding bendpoints forming a pair of bendpoints and wherein a line intersecting the pair of bendpoints defines a bend axis of the flexible membrane, wherein a first bend axis is substantially parallel to a second bend axis and also to the supporting edge.

A MEMS transducer comprising a membrane having a first membrane region and a second membrane region, wherein the first membrane region is supported at a supporting edge relative to a substrate and comprises an active central region and a plurality of supporting arms, each supporting arm extending laterally from the central region, the first membrane region being separated from the second membrane region by one or more slits, a given slit providing an unbound edge portion of the support arm, wherein the unbound edge portion traces a path from an endpoint at or near the supporting edge, wherein a path segment is defined between said endpoint which forms a first path point and a second path point, wherein the path segment traces a non-linear path.