Solid-state laser device, solid-state laser system, and laser device for exposure device

A solid state laser system comprising:

• a first solid-state laser device including:
• a first seed laser configured to output first seed light that is continuous wave laser light;
• a first light intensity changeable unit configured to change a light intensity of the first seed light to make the first seed light pulsed and output the pulsed first seed light as first seed pulse light;
• a first CW excitation laser configured to output first continuous wave excitation light;
• a first amplifier configured to amplify the first seed pulse light and output the amplified first seed pulse light as first amplified light, based on an amplification gain increased by light excitation by the first continuous wave excitation light;
• and
• a first light intensity control unit configured to control the first light intensity changeable unit according to an input of an external trigger signal, the first light intensity control unit allowing the first light intensity changeable unit to output the first seed pulse light after a certain time elapsed from an input of the external trigger signal each time the external trigger signal is input, and allowing the first light intensity changeable unit to output first suppression light that suppresses an increase of the amplification gain of the first amplifier in a period after an output of the first seed pulse light until an input of a next external trigger signal,
• a second solid-state laser device including:
• a second seed laser configured to output second seed light that is continuous wave laser light;
• a second light intensity changeable unit configured to change a light intensity of the second seed light to make the second seed light pulsed and output the pulsed second seed light as second seed pulse light;
• a second CW excitation laser configured to output second continuous wave excitation light;
• a second amplifier configured to amplify the second seed pulse light and output the amplified second seed pulse light as second amplified light, based on an amplification gain increased by light excitation by the second continuous wave excitation light;
• and
• a second light intensity control unit configured to control the second light intensity changeable unit according to an input of an external trigger signal, the second light intensity control unit allowing the second light intensity changeable unit to output the second seed pulse light after a certain time elapsed from an input of the external trigger signal each time the external trigger signal is input, and allowing the second light intensity changeable unit to output second suppression light that suppresses an increase of the amplification gain of the second amplifier in a period after an output of the second seed pulse light until an input of a next external trigger signal, and
• a sum frequency wavelength conversion unit configured to generate third pulse laser light including a sum frequency of the first pulse laser light output from the first solid-state laser device and the second pulse laser light output from the second solid-state laser device.