Methods of shielding an embedded MRAM array on an integrated circuit product comprising CMOS based transistors
AssigneeGlobalfoundries Inc.
InventorsDimitri Houssameddine, Chenchen Jacob Wang, Bin Liu
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AssigneeGlobalfoundries Inc.
InventorsDimitri Houssameddine, Chenchen Jacob Wang, Bin Liu
Estimating the term…
One illustrative method disclosed herein includes forming an MRAM memory array and a plurality of peripheral circuits for an integrated circuit product above a semiconductor substrate, forming a patterned layer of a metal-containing shielding material above the substrate, the patterned layer of metal-containing shielding material covering the MRAM memory array while leaving an area above the plurality of peripheral circuits exposed, and, with the patterned layer of metal-containing shielding material in position, performing a silicon dangling bond passivation anneal process on the integrated circuit product.
A method of forming an integrated circuit product, comprising:
A method of forming an integrated circuit product, comprising:
Dependencies are inferred from the claim text.