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US 10,374,106 B2Granted
Integrated graphene detectors with waveguides
AssigneeGlobalfoundaries Inc.
InventorAjey P. Jacob
Life of this patent
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.
Claims15
A structure, comprising:
- a plurality of non-planar fin structures composed of substrate material;
- a non-planar sheet of graphene material which is a wraparound structure extending entirely over and filling an entire space between each of the plurality of non-planar fin structures;
- a plurality of gate contacts provided over the non-planar fin structures and separated from the non-planar sheet of graphene material by insulator material;
- and
- source and drain contacts in electrical contact with the non-planar sheet of graphene material between the non-planar fin structures.
2 more elements
A structure, comprising:
- a plurality of non-planar fin structures composed of substrate material;
- a non-planar sheet of graphene material which is a wraparound structure extending entirely over and filling an entire space between each of the plurality of non-planar fin structures;
- a plurality of top contacts in direct electrical contact with the non-planar sheet of graphene material using metal vias;
- and
- source and drain contacts in electrical contact with the non-planar sheet of graphene material between the non-planar fin structures.
2 more elements
Dependencies are inferred from the claim text.