Tin-zinc microbump structures and method of making same
AssigneeIntel Corporation
InventorsSri Chaitra J. Chavali, Amanda E. Schuckman, Kyu Oh Lee
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AssigneeIntel Corporation
InventorsSri Chaitra J. Chavali, Amanda E. Schuckman, Kyu Oh Lee
Estimating the term…
Techniques and mechanisms for providing effective connectivity with surface level microbumps on an integrated circuit package substrate. In an embodiment, different metals are variously electroplated to form a microbump which extends through a surface-level dielectric of a substrate to a seed layer including copper. The microbump includes a combination of tin and zinc that mitigates precipitation of residual copper by promoting the formation of miconstituents in the microbump. In another embodiment, the microbump has a mass fraction of zinc, or a mass fraction of tin, that is different in various regions along a height of the microbump.
A method for forming microbumps on a substrate, the method comprising:
Dependencies are inferred from the claim text.