Semiconductor device and related manufacturing method
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorDeyuan Xiao
Life of this patent
Estimating the term…
Abstract
A semiconductor device may include a substrate, an n-channel field-effect transistor positioned on the substrate, and a p-channel field-effect transistor positioned on the substrate. The n-channel field-effect transistor may include an n-type silicide source portion, an n-type silicide drain portion, and a first n-type channel region. The first n-type channel region may be positioned between the n-type silicide source portion and the n-type silicide drain portion and may directly contact each of the n-type silicide source portion and the n-type silicide drain portion.
Claims7
A method for manufacturing a semiconductor device, the method comprising:
- preparing a substrate;
- providing an n-channel field-effect transistor positioned on the substrate, wherein the n-channel field-effect transistor comprises an n-type silicide source portion, an n-type silicide drain portion, and a first n-type channel region, and wherein the first n-type channel region is positioned between the n-type silicide source portion and the n-type silicide drain portion and directly contacts each of the n-type silicide source portion and the n-type silicide drain portion, wherein the entire first n-type channel region has a same conductivity type and a same width, and a doping concentration value at a gate-channel interface of the first n-type channel region is higher than a doping concentration value at an inner center portion of the first n-type channel region, and wherein the n-type silicide source portion, the n-type silicide drain portion, and the first n-type channel region have a same height;
- and
- providing a p-channel field-effect transistor positioned on the substrate.
Dependencies are inferred from the claim text.